Ä¢¹½tv chemical engineering professor, team working to improve semiconductor manufacturing process
October 23, 2024

Ä¢¹½tv Chemical Engineering assistant professor Anthony Engler and his team are working to address technological and manufacturing bottlenecks that plague computer chip production.
With the help of a nearly $2 million grant from the National Science Foundation’s Future of Semiconductors Program, the team is designing, synthesizing, and investigating new polymers and processes for high-resolution patterning in semiconductor manufacturing.
Engler’s project focuses on developing new classes of Extreme Ultraviolet, or EUV, sensitive polymers that create a more enhanced performance in computer chips.
As a part of this project, an EUV exposure module will be built at Ä¢¹½tv’s Center for Advanced Microstructures and Devices synchrotron. This facility provides important resources for academic and industrial researchers and will advance Ä¢¹½tv’s role in semiconductor research.
This project will also act as an outreach component to students K-12, where students will get a hands-on learning experience with chip manufacturing.
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